df28afa25eb21ed4b4fc09200d694d9d

KLA 21XX parts

Equipment configuration:
575-651899-00 Air Cylinder Double Acting 10" Stroke
560-651900-00 REGULATOR AIR SELF RELIEVING
590-664312-000 VALVE, FLOW CONTROL
750-678850-00 Blocking Valve
740-678050-00 Dump Valve Assembly/Exhaust Valve Assembly
740-677197-00 External Fan Module
740-677197-001 ASSY,FAN MODULE 2135 W/CRATE
035-711813-00 Fan Rotary 3.5 DIA
575-656927-00 Venturi Pump
740-654246-00 Solenoid Pneumatic
740-677299-00 Blower Assembly
035-651511-00 Fan Exhaust Electronic Cab 530CFM
560-652336-00 REGULATOR 5-100 PSIG
740-694842-000 ASSY,LEFT CASSETTE NEST,5.2,ASMIF
740-694843-000 ASSY,RIGHT CASSETTE NEST,5.2,ASMIF
740-652341-00 Elevator Assembly
750-658567-00 End Effector Low Contact ( 6" or 8" )
740-651822-00 Robot Assembly
740-661681-001 ROBOT Z BRAKE MOTOR
740-661124-00 BRAKE WHEEL, KLA2138
740-695664-000 I-SMIF ZX LEFT,FIXED ORIFI,TSTD,CU
740-695665-000 I-SMIF ZX RT,FIXED ORIFI,TSTD,CU INTRCON
TWIS0042 ISMIF Elevator Cylinder
TWIS0043 Slider Cylinder
730-651201-07 MIB Stepper Cardcage
730-651250-00 A/F Control
730-651317-00 Y Amp / Motor Power
730-656354-00 CABLE CAMERA VIDEO 9 POS SUB D
730-657774-00 X Amp Control AF3
730-657775-00 Z Amp Control AF3
730-661997-00 ASSY, CABLE, LEFT, CASSETTE HOME, SENSOR
730-664546-000 ASSY,CABLE LEFT CASSETTE ACCESS SENSOR
730-678333-00 Y MIF Control
730-678341-00 ZPLL2/FFA I/F CABLE
730-678355-00 CABLE, MIB-1 I/S
730-678406-00 MIB
730-678441-00 VME Interface
730-679296-00 Cable, ZPLL2 / FFA I/F , IS
730-679298-00 CABLE MIB1, IS TO WIB
501-680368-00 Arc Lamp Xenon 150W
050-651842-00 Lamp Micro Line Filament Theta Lamp
135-652366-00 Air Flow Switch
135-654552-00 SWITCH AIR FLOW E.D.
135-677115-00 Air Flow Switch W/3002 Type PLLAD
135-650865-00 Air Low X Theta Switch (SWITCH, PRESSURE)
TWIS0037 Arc Lamp Lead cabel set
150-663083-00 TRANS 120/24 VAC 80 VA ( T1)
095-650484-00 Contactor 3 Phase
262-650185-00 Coupler, Bellow for Y-Stage
760-663761-001 ASSY,VERTICAL ILLUMINATOR,UBB
150-658317-00 Main Illuminator Ignitor
300-653633-00 Robot Z timing belt ( Belt Timing .080" Pitch X .375w x 320 Grooves)
040-663803-000 CB1 Circuit Breaker 40A 3 Pole Merin Gerin
040-680574-000 CB2 Circuit Breaker 20A 3 Pole Merin Gerin
040-663802-000 CB3 Circuit Breaker 13A 3 Pole
TWIS0079 3P 10A Breaker(Black)
TWIS0080 3P 20A Breaker(Black)
095-677673-00 CONTACTOR, 3POLE, 40A, 24VAC COIL ( K2)
095-651831-00 RELAY 24VAC DELAY ON BREAK ( K3)
095-678611-00 CONTACTOR, 3POLE, 10A, 24VAC COIL ( K4)
095-677674-00 CONTACTOR,3 POLE,10A,24VAC,PRESS. CONN. (K5)
740-651221-00 Motor Mag Changer
740-651246-02 Motor Robot End Effector
740-651246-01 Motor Robot Shoulder
740-651309-00 Motor Robot Z
740-651235-00 Motor Stage Y
740-659623-00 Theta Fine Drive ( Micrometer Assy ) (Fine Theta Assy.)
740-651233-01 Motor Cassette Left
740-652368-00 Motor Elev W/Pulley //Motor Robot Z
740-659653-00 2132 MOTOR FOCUS ZOOM
750-677187-00 Motor Stage X .3G 2135
750-677456-00 Voice Coil Motor( Active Damping Motor 2135)(VCM)
750-658394-00 Manipulator B/F Lamp X,Y,Z Adjustment Head
760-659516-00 2132 MANIPULATOR W/SWITCH,B/F LAMP
760-658432-00 ND Filter BF
750-657650-01 Receiver Assembly IRS Left
750-657650-02 Receiver Assembly IRS Right
750-662330-00 CCD Camera
750-772889-000 CAMERA REVIEW SONY DXC 9000 TESTED
760-659955-00 ASSY,LIGHT PIPE (FIELD REPLACEMENT ASSY)
760-677178-00 Y Mirror Assembly 2135 Only
760-696040-000 ASSY, 2135 Y-MIRROR FRU
760-696039-000 ASSY,2138 Y-MIRROR FRU
760-663904-001 ASSY,Y-MIRROR,UBB,2138
760-680069-00 VERTICAL ILLUMINATOR, 2135
710-657058-001 A/F LED Illuminator--------------AFLED
710-657068-20 A/F Pulse Sensor Preamp
710-667685-000 ADSC CE Mark
710-678218-00 ADSC
710-678218-001 ADSC
710-657600-20 Autofocus Controller 2
710-663509-000 Autofocus Controller 2B for ADC
710-677833-00 AVC 2
710-677833-003 AVC,2135
710-679958-00 Baseflex EMC
710-678715-00 Backplane, SAT IMC
710-678530-00 Baseplate Flex 2
750-663544-000 Bridge adapter, EPIM-T
710-650044-20 Defect Detector Array
710-678525-001 Defect Filter Array V4
710-678545-00 Display Processor 2
710-679375-002 Display Processor 3
710-663106-000 Dual Stepper Driver 2
710-663106-001 ASSY,TESTED DUAL STEPPER DRIVER 2
705-678119-00 Etherlink 3 Network Card 3C509B ISA
705-678900-00 Ethernet Controller Adapter
705-689996-000 NIC,FAST ETHERNET,3COM,3C905B-COMBO,PCI
710-678890-001 Full Field Alignment 2 BRD
710-658908-00 Full Field Alignment BRD
710-694566-000 PCB ASSY,FLOW VALVE POWER AMP 3
710-678272-00 ASSY TESTED, FVPA 2 PCA
710-772307-000 Genesis/Frame Grabber w/64MB Memory
710-658787-00 Light Level Sensor Board
710-658956-00 Mass Memory 2 (MM2)
740-689986-002 Mass Memory Edge Detector
710-693221-000 Matrox Corona PCB Revision 6 (System & ADC PC)
710-653699-002 MIB 2 //ASSY TESTED MIB II ESCORT
710-657231-20 ASSY, TESTED NSC 2
710-660800-001 ASSY, TESTED NSC 3
740-677509-00 PLLAD 1 Non-CE
740-680472-00 PLLAD 1 2135CE
740-695641-000 PLLAD 4 assy Non-CE
740-695511-000 PLLAD 4 assy CE
710-658669-00 PLLAD1 Daughter board
710-695506-001 PCB,TESTED PLLAD 4 MOD
740-695589-000 PCB,SYSTEM TESTED PLLAD 4 MOD
750-654113-00 Pneumatic Solenoids Interface PCB
710-661726-00 Random Defect Filter S.A.T
710-661726-001 ASSY, TESTED S.A.T. DEFECT FILTER
710-663424-001 Random Defect Processor S.A.T V2
710-661729-00 Random Defect Processor S.A.T.
710-677928-00 Robot 3
760-666954-000 TDI Assy, Rear TDI Panel, Gasket & TDI Cover
710-680249-001 TDI Clock Driver Sensor Driver 2
710-678434-001 TDI Sensor Daughter Board
710-677271-00 Video Switch
710-658807-00 VIF Board(VIF 2)
710-689987-000 VIF 3 Board
710-680976-002 Wafer Inspector Backplane 2 EMC
710-659227-00 Wafer Inspector Backplane 3
705-689372-000 Wincommb RS232 Card
710-677782-00 X Single Axis Controller 4
710-679819-001 X Single Axis Controller 4 E.M.C -- CE Mark
710-658909-001 XY Interpolator Board
710-650204-20 Y Flex
710-679610-001 Y Flex 2 EMC -- Only CE Mark
710-659279-00 Y Mirror Interface
710-679920-00 Y Single Axis Controller 4
710-657412-20 Z POD 2
710-659025-00 ASSY TESTED ZPLL 2 BOARD
710-679821-00 ZPLL 2 EMC
710-679821-001 TESTED,EMC ZPLL2
740-680212-001 Bridge Assy.
740-688080-001 ASSY,TESTED COMPUTER,INDUSTRIAL PC
740-689559-001 ASSY,COMPUTER,2135 DOS IPC
740-678096-00 ASSY, TESTED, PENTIUM COMPUTER, UI, 2135
750-677708-001 Joystick 2-Axis
740-693902-002 ASSY,TSTD CMPTR,2139 SINGLE PROCESSR IPC
740-695783-002 ASSY,TSTED CMPTR,XP DUAL PROCESSOR IPC
740-695784-002 ASSY,TSTED CMPTR,2139 DUAL PROCESSOR IPC
070-658316-00 Main Illuminator Power Supply(Lamp Power Supply)
070-661811-00 Main Illuminator Power Supply With Fan(Lamp Power Supply)
740-652283-00 Power Supply +/- 15V
070-651069-00 Power Supply +/-15V 5A
755-678965-00 Power Supply +18 VDC
755-678966-00 Power Supply +120V Y-Mirror
740-661814-00 Power Supply +24V 20A & 48V 10A
755-678967-00 Power Supply +5 VDC 50A
755-678968-00 POWER SUPPLY, 5.0 VDC, LEFT DOOR
755-678983-00 POWER SUPPLY, -5VDC ANALOG, LEFT DOOR
0030034-001 POWER SUPPLY, TESTED ARTESYN
740-679133-00 Power Supply +5V, 35A
755-678963-00 Power Supply -12 VDC
740-679132-00 Power Supply -24V 7.5A / 65V 6A
070-677093-00 Power Supply -2V, -5.2V, +12V, -12V ( Other )
740-678616-00 X and Z Amp Slider Assembly
740-658138-00 Y AMP 12V Power Supply slider
IPC-PS IPC power supply
750-660755-001 NANOSENSOR,ELECTRONICS CONTROL,2100-20
730-661997-00 ASSY, CABLE, LEFT, CASSETTE HOME, SENSOR
730-661998-00 CABLE, RIGHT, CASSETTE HOME SENSOR
740-651298-01 Cassette Present Sensor Left
740-651298-02 Cassette Present Sensor Right
730-653231-00 End Effector Sensor Harness
665-650123-02 Flag Presence Left
740-653204-00 Edge Sensor Assy. ( Theta Lamp Assy. )
750-664296-000 LED Mapping Sensor Left
750-664297-000 LED Mapping Sensor Right
740-661047-00 Active X Brake
750-663138-000 ASSY, 6'- 8' LOW CONTACT END EFFECTOR-2
740-659620-00 Theta Rod Rear w/leash
750-651610-00 Y Leadscrew
575-652179-00 Air Cylinder 1 1/2 Bore (turret cylinder)
560-652335-00 PRESSURE GUAGE 0~100 PSI
0073170-000 I-SMIF PIC BOARD
TWIS0002 VALVE SOL BODY PT
TWIS0056 Air filter assembly
TWIS0084 Coupler, Bellow for Y-Stage
TWIS0085 Relieve valve
TWIS0092 Eddy Current Sensor Assembly
TWIS0125 Cylinder for Hi/Lo mag tube
TWIS0128 LATCH ACTUATOR
TWIS0155 Theta Rod
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