Customized&Service

TBCL service team provide field service/relocation/audit for metrology platform includes

   * Defect Inspection System- KLA Bright field

       - 2132, 2135, 2138, 2139

       - 23XX

       - 2552

   * Thickness Measurement- KLA UV Series

       - 1050, 1080, 1250, 1280

   * Resistivity Measurement System

       - RS35, RS55, RS75, RS100

   * Thickness Measurement- Thermawave series

       - OP2600, 3260, 3290, 5205, 5230, 5240

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