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Customized&Service
TBCL service team provide field service/relocation/audit for metrology platform includes
* Defect Inspection System- KLA Bright field
- 2132, 2135, 2138, 2139
- 23XX
- 2552
* Thickness Measurement- KLA UV Series
- 1050, 1080, 1250, 1280
* Resistivity Measurement System
- RS35, RS55, RS75, RS100
* Thickness Measurement- Thermawave series
- OP2600, 3260, 3290, 5205, 5230, 5240